Z010 Stage
Key Features
Voice Coil for High Dynamic
|
Selectable and Adjustable Counterbalance
|
Cross roller bearing for High Stiffness
|
Linear encoder for High Accuracy
|
Specifications
Z010
Travel Range
10mm
Accuracy
1.0μm
Bi-Repeatability(3σ)
0.5μm
Min. Increment Motion *1
20nm
Max. Velocity *2
100mm/s
Max. Acceleration *2
1g
Straightness
2μm
Load Capacity *3
1-4.4kg
*1 MIM depends on controller, drive, environment vibration and support frame, please contact us for details.
*2 Velocity and Acceleration depend on load, controller and drive, please contact us for details.
*3 Dynamic performance can be optimized if the exact load conditions are informed to our engineering team.
Order Code Description:
Series
Stroke
Scale Type
Encoder Output
Cable Out
Z
010: 10
AA: Sin/Cos
CBxx: Refer to
Counterbalance Spring Selection Guide
C01: 1m Cable