MC025 Stackable Stage

Key Features

Monolithic design for Compact Size

Stackable and reliable

Cross roller guide for High Stiffness

Linear encoder for High Accuracy

Specifications

	MZ024
Travel Range	100mm
Accuracy	-P: 1.0μm -C: 1.5μm
Bi-Repeatability(3σ)	-P: 0.3μm -C: 0.6μm
Min. Increment Motion *1	AA: 10nm DS: 200nm
Max. Velocity *2	200mm/s
Max. Acceleration *2	0.5g
Straightness(horizontal direction)	1.5μm
Straightness(vertical direction)	2μm
Yaw	15μrad
Pitch	50μrad
Load Capacity *3	10kg

*1 MIM depends on controller, drive, environment vibration and support frame, please contact us for details.

*2 Velocity and Acceleration depend on load, controller and drive, please contact us for details.

*3 Dynamic performance can be optimized if the exact load conditions are informed to our engineering team.